A High Purity Low Outgassing Coating

What Is SilcoGuard?

SilcoGuard® is a high purity silicon barrier coating process designed to minimize vacuum system outgassing and contamination in ultra high vacuum chambers and semiconductor process flow paths.  SilcoGuard is bonded to stainless steel, alloy, glass, and ceramic surfaces by SilcoTek's patented chemical vapor deposition process.  The SilcoGuard high purity moisture repelling surface acts as a barrier, isolating any impurities trapped on or in the surface while minimizing outgassing and process contamination in UHV environments.  

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SilcoGuard coated flange

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Coating Benefits for Vacuum Process Applications

  • Significantly reduce pump down time

  • Reduce moisture contamination and outgassing

  • Barrier coating prevents surface contamination

  • Improve product yield and test purity
  • Improve productivity 

Coating Resources

If you have a technical question about how our coating technologies will perform in your application, contact our Technical Service Team and ask the experts.


If you would like to buy a coated product directly from the manufacturer, go to our Buy Coated Products page.

To get the most out of your process flow path and instrumentation coat all flow path components and systems.  This includes:

  • Sensors, and detectors
  • Heat exchangers
  • Instrumentation flow paths
  • Calibration flow paths
  • Regulators
  • Tubing
  • Valves and fittings
  • Separators and filters
  • Reactors, tanks, and canisters

 Want to test our coating before you buy?  Get a free test coupon or arrange for a free test evaluation.  




Learn More About SilcoTek.  Watch Our Process Video